Design, Modeling and Control of Nanopositioning Systems by Andrew J. Fleming,Kam K. Leang PDF

By Andrew J. Fleming,Kam K. Leang

ISBN-10: 3319066161

ISBN-13: 9783319066165

Covering the total layout cycle of nanopositioning structures, this is often the 1st entire textual content at the subject. The booklet first introduces innovations linked to nanopositioning phases and descriptions their program in such initiatives as scanning probe microscopy, nanofabrication, info garage, telephone surgical procedure and precision optics. Piezoelectric transducers, hired ubiquitously in nanopositioning purposes are then mentioned intimately together with sensible concerns and constraints on transducer reaction. The reader is then given an outline of the categories of nanopositioner prior to the textual content turns to the in-depth insurance of mechanical layout together with flexures, fabrics, production concepts, and electronics. This strategy is illustrated via the instance of a high-speed serial-kinematic nanopositioner. place sensors are then catalogued and defined and the textual content then specializes in control.

Several varieties of regulate are taken care of: shunt keep an eye on, suggestions keep an eye on, strength suggestions keep an eye on and feedforward keep watch over (including an appreciation of iterative studying control). functionality matters are given value as are difficulties restricting that functionality resembling hysteresis and noise which come up within the therapy of keep an eye on and are then given chapter-length recognition of their personal correct. The reader additionally learns approximately rate capabilities and different concerns serious about command shaping, cost drives and electric concerns. All recommendations are confirmed experimentally together with by way of direct software to atomic strength microscope imaging.

Design, Modeling and keep an eye on of Nanopositioning structures can be of curiosity to researchers in mechatronics often and up to speed utilized to atomic strength microscopy and different nanopositioning functions. Microscope builders and mechanical designers of nanopositioning units will locate the textual content crucial reading.

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Design, Modeling and Control of Nanopositioning Systems (Advances in Industrial Control) by Andrew J. Fleming,Kam K. Leang


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